| ANELVA | |||
| 使用装置 | Partｓ Number | 品名 | |
| I-2100 SRE 3CH | A17-68232 | M2*10.5L MO SCREW | |
| I-2100 SRE 3CH | B16-06175 | PY4 COLLAR | |
| I-2100 SRE 3CH | B16-18295 | M2 MOLYBDENUM | |
| I-2100 SRE 3CH | B16-06166 | HEATER ELECTRODE-2 | |
| I-2100 SRE 3CH | B16-06184 | HEATER SUPPORT PLATE-2 | |
| I-2100 SRE 3CH | B16-05129 | MO-M4 SPECIAL SCREW | |
| I-2100 SRE 3CH | A17-79998 | PY10*17L COLLAR | |
| I-2100 SRE 3CH | A18-50849 | BRIM INSULATOR-4(ALMINUM) | |
| I-2100 SRE 3CH | B16-33826 | M3 SPECIAL SCREW(1) | |
| I-2100 SRE 3CH | N30411152 | HSB-4 M4*6 MOLYBDENUM BOLT | |
| I-2100 SRE 3CH | B16-08648 | GUIDE PIN | |
| I-2100 SRE 3CH | B16-17704 | MOLYBDENUM BOLT(HEXAGON) | |
| I-2100 SRE 3CH | B16-17706 | MOLYBDENUM NUT | |
| I-2100 SRE 3CH | N30013314 | SUS304 MS6*35 HEX,SOCKET HEAD | |
| I-2100 SRE 3CH | A63-82003 | WAFER UP/DOWN MECHANISM (修) | |
| I-2100 SRE 3CH | 100931764 | LLA/B TURBO ISOLATION VALVE | |
| I-2100 SRE 3CH | DP装置專用 CASSETTE/CW-08KE | ||
| I-2100 SRE 3CH | H11-28120 | WAFER ROTATION MOTOR(ALIGNER) | |
| I-2100 SRE 3CH | 001-4130-03 | ALIGNER CONTROLLER BOX | |
| I-2100 SRE 3CH | 001-2966-06 | ALIGNER WAFER ROTATE MODULE | |
| I-2100 SRE 3CH | 880-0013-04 | ALIGNER UNIT LIP SEAL | |
| I-2100 SRE 3CH | 001-5364-03 | LOADLOCK UNIT N2 VENT Valve(O/H済) | |
| I-2100 SRE 3CH | 001-5373-01 | TRANSFER UNIT N2 VENT Valve(O/H済) | |
| I-2100 SRE 3CH | 001-7015-08 | N2 SLOW VENT VALVE GASKET | |
| I-2100 SRE 3CH | 001-5339-09 | N2 FAST VENT VALVE GASKET | |
| I-2100 SRE 3CH | B16-21120 | BV WITH TERM.(PM BV VALVE) | |
| I-2100 SRE 3CH | B16-18128 | BELLOWS VALVE(PM GFV VALVE) | |
| I-2100 SRE 3CH | A18-49363 | SOLE. VALVE(PM GTPV VALVE) | |
| I-2100 SRE 3CH | A18-49364 | SOLE. VALVE(PM HTPV VALVE) | |
| I-2100 SRE 3CH | 70028006 | CLD4V-CY-PF(EP) METAL VALVE | |
| I-2100 SRE 3CH | B16-11969 | BELLOWS VALVE(PM HFV VALVE) | |
| I-2100 SRE 3CH | H11-18818 | TMP VENT VALVE(TSF010PMZ01113) | |
| I-2100 SRE 3CH | H11-27954 | TM TMPISO VALVE(725-0018-02) | |
| I-2100 SRE 3CH | /N70060212 | GAS CLEEN PURIFIRE | |
| I-2100 SRE 3CH | H11-23936 | 5KW DC POWER SUPPLY UNIT(修) | |
| I-2100 SRE 3CH | A26-11089 | PY34 VIEW PORT | |
| I-2100 SRE 3CH | PUMP(PD-2)FOR CHILLER/008155 | ||
| I-2100 SRE 3CH | CP33E/30D CIRCUIT PROTECTOR | ||
| I-2100 SRE 3CH | 002-1100-10 | ASSY PCB..09THK.MCC2A.VCE6 | |
| I-2100 SRE 3CH | 002-2161-01 | ASSY CABLE POWER POSITRONIC | |
| I-2100 SRE 3CH | 4750-0014-05 | AIR CYLINDER | |
| I-2100 SRE 3CH | 896-0009-03 | VALVE, PRESS RELIEF | |
| I-2100 SRE 3CH | WF5025-10-A3B | FLOW METER | |
| I-2100 SRE 3CH | U21-00369 | MG-2F MINTURE GAUGE | |
| I-2100 SRE 3CH | B12-10539 | THERMOCOUPLE,W/RE / TC(TI)4T | |
| I-2100 SRE 3CH | B16-28202 | M3 SPECIAL SCREW | |
| I-2100 SRE 3CH | B16-25879 | SUS SPACER(T:0.1) | |
| I-2100 SRE 3CH | 880-5122-27 | O-RING VITON | |
| I-2100 SRE 3CH | 880-5120-17 | O-RING VITON | |
| I-2100 SRE 3CH | 880-5120-32 | O-RING VITON | |
| I-2100 SRE 3CH | 001-9340-01 | ASSY,ROTATE,VCE-4 | |
| I-2100 SRE 3CH | 880-0019-01 | O-RING KALREZ .070 ID*.07W | |
| I-2100 SRE 3CH | H11-20575 | RADIATION THERMOMETER | |
| I-2100 SRE 3CH | 10955 | 5A FUSE | |
| I-2100 SRE 3CH | B16-39550 | FIBER SENSOR HEAD ASSEEMBLY | |
| I-2100 SRE 3CH | A12-82248 | ODS-ADIO1632-A | |
| I-2100 SRE 3CH | A14-64439 | ODS-DIO32-D | |
| I-2100 SRE 3CH | B16-06186 | BOLT,M4 | |
| I-2100 SRE 3CH | B16-06179 | QUARTZ GUIDE PIN | |
| I-2100 SRE 3CH | B16-06187 | BOLT,M6 | |
| I-2100 SRE 3CH | VQ 1000 MANIFOLD | ||
| I-2100 SRE 3CH | H11-27930 | VCE4 DOOR O-RING 880-5123-88 | |
| I-2100 SRE 3CH | H11-27914 | MTR-5 ROBOT DRIVING UNIT | |
| I-2100 SRE 3CH | 710-0022-03 | BEARING PRELOADED | |
| I-2100 SRE 3CH | 710-0023-01 | BEARING ANGULAR CONTACT | |
| I-2100 SRE 3CH | H11-27931 | VEC4 EMITTER FOR AUTODOOR | |
| I-2100 SRE 3CH | H11-27932 | VCE4 SAFTY DOOR SWITCH | |
| I-2100 SRE 3CH | H11-279337 | VCE DOOR VALVE SOLENOIDO(修) | |
| I-2100 SRE 3CH | N70023288 | KCD4S-VC-EP AIR OPERATE VALVE | |
| I-2100 SRE 3CH | N70023355 | KCD4MS-VFC-EP MANUAL VALVE | |
| I-2100 SRE 3CH | M-066QG MASS SPECTROMETER (修) | ||
| I-2100 SRE 3CH | H11-2795 | TURBO BACKING VALVE/896-0014-01 | |
| I-2100 SRE 3CH | FIBER SENSOR/H11-27918/755-0002-01 | ||
| I-2100 SRE 3CH | H11-28115 | VCE4 SPS RECEIVER PCB/001-9226 | |
| I-2100 SRE 3CH | H11-28116 | VCE4 SPS RECEIVER PCB/001-9250 | |
| I-2100 SRE 3CH | H11-27929 | ASSY,VCE-4,WSO,PCB/001-9116-01 | |
| I-2100 SRE 3CH | K2500311 | 564IONIZATION TUBE Ion Vaccum gauges | |
| I-2100 SRE 3CH | H11-27935 | ALIGNER CCD(001-3011-02) | |
| I-2100 SRE 3CH | H11-27936 | ALIGNER LED(001-3012-06) | |
| I-2100 SRE 3CH | A18-47883 | PRESSURE SWITCH WITH END WORK | |
| I-2100 SRE 3CH | 953-5014 | GASKETIon Vaccum gauges and LIFT PIN Parts | |
| I-2100 SRE 3CH | B12-02457 | BASE RING(HEATER) | |
| I-2100 SRE 3CH | B16-11356 | HEATER SUPPORT | |
| I-2100 SRE 3CH | SQUARE SLOT VALVE REPAIRED | ||
| I-2100 SRE 3CH | SQUARE SLOT VALVE REPAIRED | ||
| I-2100 SRE 3CH | B12-14674 | PY256 LOW HEATER(2)-4 | |
| I-2100 SRE 3CH | MFC 20SCCM/980C***SI2H6*20C*4V | ||
| I-2100 SRE 3CH | B12-02035 | REFLECTOR-3 | |
| I-2100 SRE 3CH | B16-06176 | SHEET MOLYBDENUM T:0.1 | |
| I-2100 SRE 3CH | B12-02034 | REFLECTOR-2 | |
| I-2100 SRE 3CH | B012-02033 | REFLECTOR-1 | |
| I-2100 SRE 3CH | B16-06190 | HEATER, ELECTRODE-3 | |
| I-2100 SRE 3CH | B16-06159 | HEATER, ELECTRODE-1 | |
| I-2100 SRE 3CH | U21-00368 | MINIATURE GAUGE MG-2 | |
| I-2100 SRE 3CH | TMH260 TURBO PUMP REPAIR | ||
| I-2100 SRE 3CH | TCP 380 CONTROLLER REPAIRED | ||
| I-2100 SRE 3CH | TCP 380 CONTROLLER REPAIRED | ||
| I-2100 SRE 3CH | N50008428 | TD1111 TMP CONTROLLER | |
| I-2100 SRE 3CH | TD370-02 TMP CONTROLLER | ||
| I-2100 SRE 3CH | N50003284 | TG1113 MV TMP | |
| I-2100 SRE 3CH | N50022565 | GAUGE MODUCELL 325 | |
| I-2100 SRE 3CH | H11-28122 | INCOOLER PHOTO FLAG SENSOR | |
| I-2100 SRE 3CH | VALVE AIR OPERATED 6LVV-DPFR4-P-C/725-0 | ||
| I-2100 SRE 3CH | H11-27943 | INCOOLER WAFER SENSOR | |
| I-2100 SRE 3CH | (71-PV-0990R)DRAIN PUMP(IWAKI)/MD-100RM | ||
| I-2100 SRE 3CH | SHOWER PUMP /MD-70R(M)-(IWAKI) | ||
| I-2100 SRE 3CH | (74-WB-0980)O-RING P34 VITON BLK | ||
| I-2100 SRE 3CH | NESLAB PARTS FOR CHILLER/COUPLING PD-2 | ||
| I-2100 SRE 3CH | B16-29620 | PY2 QUARTZ ROD L61,SET/3EA | |
| I-2100 SRE 3CH | B12-02022 | QUARTZ PLATE-1 | |
| I-2100 SRE 3CH | B12-02031 | QUARTZ PLATE-2 | |
| I-2100 SRE 3CH | B12-02032 | QUARTZ PLATE-3 | |
| リストに無い型番もお問い合わせ下さい。 | |||