Canon
使用装置 Parts Number 品名
EX6 Y60-1447-000 OPTICAL MIXER UNIT 
EX6 BG3-3467-000 OXYGEN METER UNIT 
EX6  Y60-0986-000 POLARIZER FILTER UNIT
EX6 Y60-1352-000 SEAL GLASS(GIGAPHOTON)
EX6 BH2-9114-000 DRIVER UNIT,MOTOR
EX6 BG3-6735-000 E-CI-CD6 PCB ASS
EX6 BE1-3484-000 KNURLED SCREW,S
EX6 BG3-6413-000 DRIVE UNIT,1ST CONDENSER 
EX6 BG3-7142-000 AC/DC POWER SUPPLY UNIT
EX6 BG-6716-000 MEASUREMENT PCB(Y,YQ)
EX6 BG4-7938-000 HROA CD2(W)PCB ASSY
EX6 BG4-8591-000 EASL-CD PCB ASSY
EX6 BG4-8592-000 EASR-CD PCB ASSY
FPA3000iW BG4-6626-000 MAIN CPU PCB 
FPA3000iW Y75-4133-000 C-OIL PRESSURE SENSOR 
FPA3000iW Y60-0934-000 TRANSFORMER WITH CABLE 
FPA3000iW  BS2-4328-000 TIMING BELT
FPA3000iW BG4-5422 PIEZO STACK UNIT (THETA)
FPA3000iW BG4-7653 IL2W CD PCB 
FPA3000iW BG4-6786-000 DETECTOR UNIT, A/F ELEVATOR
FPA3000iW BG4-6735-R00(CANON) RETICLE ROBOT UNIT 
FPA3000iW DA30500056 WAFER CHUCK 9-043-0
FPA3000iW   CERAMIC ARM, CANON-2000I, Al2O3>99.5%
FPA3000iW BG4-7648-000 1ST CONDENSOR LENS UNIT
FPA3000iW BG4-7082-000 I LINE POWER SUPPLY
FPA3000iW  Y60-1108-000 THETA-Z TILT UNIT(I4/IW)
FPA3000iW  BG4-7142-000 Fine theta cable
FPA3000iW BH5-3500-000 DC POWER SUPPLY(PPC)
FPA3000iW BH2-1218-000 MAGNETIC VALVE
FPA3000iW BS7-3001-000 VALVE
FPA3000iW WL2-5002-000 MATOR,AC 24.6W
FPA3000iW WP8-5050-000 CANON XYZ SENSOR AMPLIFER
FPA3000iW Y75-6033-000 POWER SUPPLY,PM-16
FPA3000iW BG4-6686-000 MIRROR SWITCHING UNIT
FPA3000iW BG4-8887-000 COLLIMATOR LENS UNIT
FPA3000iW Y60-1140-000 MOTOR DRIVER UNIT,AC
FPA3000iW Y60-0881 WAVELENGTN SWITCHING UNIT
FPA3000iW   (36-05-0002)GALDEN HT-110(5KG/EA)
FPA3000iW BS2-9038-000 GREASE 
FPA3000iW BG0-7821-000 HE-NE-LASER
FPA3000iW VD7-1511-502 FUSE,15A 250V 200mA
FPA3000iW WD1-0080-000 FUSE,5MT 1A 125V
FPA3000iW BS2-9031 COUPLING 
FPA3000iW BG4-6457-000 XY STAGE PREAMP PCB 
FPA3000iW  BG4-6458-000 CURRENT FEED-BACK PCB
FPA3000iW BH2-1080 MAGNETIC VALVE 
FPA3000iW BG4-2770 LINEAR MOTOR DRIVE PCB 
MAS1800 PT3-1125-000 PLATE O-RING G-375(Si) 
MAS1800 2T3-2017-000 PIRANI PORT O-RING V-15(Si)
MAS1800 PT3-2017-000 O-RING V-15(Si) 
MAS1800 2T3-2009-000 CAVITY TOP O-RING V-210(Si)
MAS1800 PT3-2009-000 CAVITY TOP O-RING V-210(Si)
MAS1800 2C7-1499-000 BELLJAR SE-A1808(PTFE) 
MAS1800 PC7-1410-000 BOTTOM-RING SE-A1810(PTFE) 
MAS1800   Temp controller(RKC)(FB900-8N-4*4N5D/AN)
MAS1800 2S1-8001-000 EXPANDE METAL 
MAS1800 2C7-2855-000 SLEEVE,TC A12784A 
MAS1800 2C7-1677-000 RING SUPPORT,A11936A 
MAS1800  XB7-1030-082 SCREW,M3*8
MAS1800 XD1-3100-402 WASHER,M4 
MAS1800   POWER SUPPLY UNIT 15V/Q-120C
MAS1800 2C7-1476-000 Quartz Belljar/A10304a
MAS1800 PC7-1476-000 Quartz Belljar/A10304a
MAS1800   QUARTZ DIFFUSION RING(1800N/P-P-DQ)
MAS1800   QUARTZ BASE PLATE(1800N/P-P-Q)
MAS1800 A10121A QUARTZ VAC.RING
MAS1800 A10123 QUARTZ PLATE
MAS8000   O-RING(ULTRA HEAT-PROOF SILICO)P-12
MAS8000   O-RING(ULTRA HEAT-PROOF SILICO)1516-5
MAS8000   O-RING(ULTRA HEAT-PROOF SILICO)V-40
MAS8000 2T3-1086-000 O-RING AS568-326(VITON) 
MAS8000 2H5-0060-000 CONTROLLER,HEATER
MAS8000   Temp Controller CB400FK07-V*AF-NN/A/Y(RKC)
MAS8000 2T3-0210-000 O-RING AS568-263,KALREZ BLK
MAS8000 PH0-4098-000 ROBOT SENSOR(EE-SX673)
MAS8000   SOLENOID VALVE 111E1-PS DC24V(KOGANEI)
MAS8000 2C7-2406-000 BOLT SE50137-A825 
MAS8000 2C7-2484-000 PLASTIC HINGE 
MAS8000 2C7-4001-000 PIN,A16101A-02 
MAS8000 2C7-4101-030 WAFER GUIDE,A16201A-03 
MAS8000 47213-C97-3301-01 THERMO COUPLE,
MAS8000 2T3-0208-000 O-RING P49 /  (VITON)
MAS8000 2H4-0169-000 DIGITAL OUTPUT
MAS8000 PC7-2355-000E Ring,Gas(A)
MAS8000 A16132A-04 INNER RING(MIDDLE),
MAS8000 A16616A INNER RING(UPPER),
MAS8000 A16617A INNER RING(LOWER),
MAS8000 2C7-4513-000 QUARTZ PLATE 200MM PROX 
リストに無い型番もお問い合わせ下さい。