| Canon | |||
| 使用装置 | Parts Number | 品名 | |
| EX6 | Y60-1447-000 | OPTICAL MIXER UNIT | |
| EX6 | BG3-3467-000 | OXYGEN METER UNIT | |
| EX6 | Y60-0986-000 | POLARIZER FILTER UNIT | |
| EX6 | Y60-1352-000 | SEAL GLASS(GIGAPHOTON) | |
| EX6 | BH2-9114-000 | DRIVER UNIT,MOTOR | |
| EX6 | BG3-6735-000 | E-CI-CD6 PCB ASS | |
| EX6 | BE1-3484-000 | KNURLED SCREW,S | |
| EX6 | BG3-6413-000 | DRIVE UNIT,1ST CONDENSER | |
| EX6 | BG3-7142-000 | AC/DC POWER SUPPLY UNIT | |
| EX6 | BG-6716-000 | MEASUREMENT PCB(Y,YQ) | |
| EX6 | BG4-7938-000 | HROA CD2(W)PCB ASSY | |
| EX6 | BG4-8591-000 | EASL-CD PCB ASSY | |
| EX6 | BG4-8592-000 | EASR-CD PCB ASSY | |
| FPA3000iW | BG4-6626-000 | MAIN CPU PCB | |
| FPA3000iW | Y75-4133-000 | C-OIL PRESSURE SENSOR | |
| FPA3000iW | Y60-0934-000 | TRANSFORMER WITH CABLE | |
| FPA3000iW | BS2-4328-000 | TIMING BELT | |
| FPA3000iW | BG4-5422 | PIEZO STACK UNIT (THETA) | |
| FPA3000iW | BG4-7653 | IL2W CD PCB | |
| FPA3000iW | BG4-6786-000 | DETECTOR UNIT, A/F ELEVATOR | |
| FPA3000iW | BG4-6735-R00(CANON) | RETICLE ROBOT UNIT | |
| FPA3000iW | DA30500056 | WAFER CHUCK 9-043-0 | |
| FPA3000iW | CERAMIC ARM, CANON-2000I, Al2O3>99.5% | ||
| FPA3000iW | BG4-7648-000 | 1ST CONDENSOR LENS UNIT | |
| FPA3000iW | BG4-7082-000 | I LINE POWER SUPPLY | |
| FPA3000iW | Y60-1108-000 | THETA-Z TILT UNIT(I4/IW) | |
| FPA3000iW | BG4-7142-000 | Fine theta cable | |
| FPA3000iW | BH5-3500-000 | DC POWER SUPPLY(PPC) | |
| FPA3000iW | BH2-1218-000 | MAGNETIC VALVE | |
| FPA3000iW | BS7-3001-000 | VALVE | |
| FPA3000iW | WL2-5002-000 | MATOR,AC 24.6W | |
| FPA3000iW | WP8-5050-000 | CANON XYZ SENSOR AMPLIFER | |
| FPA3000iW | Y75-6033-000 | POWER SUPPLY,PM-16 | |
| FPA3000iW | BG4-6686-000 | MIRROR SWITCHING UNIT | |
| FPA3000iW | BG4-8887-000 | COLLIMATOR LENS UNIT | |
| FPA3000iW | Y60-1140-000 | MOTOR DRIVER UNIT,AC | |
| FPA3000iW | Y60-0881 | WAVELENGTN SWITCHING UNIT | |
| FPA3000iW | (36-05-0002)GALDEN HT-110(5KG/EA) | ||
| FPA3000iW | BS2-9038-000 | GREASE | |
| FPA3000iW | BG0-7821-000 | HE-NE-LASER | |
| FPA3000iW | VD7-1511-502 | FUSE,15A 250V 200mA | |
| FPA3000iW | WD1-0080-000 | FUSE,5MT 1A 125V | |
| FPA3000iW | BS2-9031 | COUPLING | |
| FPA3000iW | BG4-6457-000 | XY STAGE PREAMP PCB | |
| FPA3000iW | BG4-6458-000 | CURRENT FEED-BACK PCB | |
| FPA3000iW | BH2-1080 | MAGNETIC VALVE | |
| FPA3000iW | BG4-2770 | LINEAR MOTOR DRIVE PCB | |
| MAS1800 | PT3-1125-000 | PLATE O-RING G-375(Si) | |
| MAS1800 | 2T3-2017-000 | PIRANI PORT O-RING V-15(Si) | |
| MAS1800 | PT3-2017-000 | O-RING V-15(Si) | |
| MAS1800 | 2T3-2009-000 | CAVITY TOP O-RING V-210(Si) | |
| MAS1800 | PT3-2009-000 | CAVITY TOP O-RING V-210(Si) | |
| MAS1800 | 2C7-1499-000 | BELLJAR SE-A1808(PTFE) | |
| MAS1800 | PC7-1410-000 | BOTTOM-RING SE-A1810(PTFE) | |
| MAS1800 | Temp controller(RKC)(FB900-8N-4*4N5D/AN) | ||
| MAS1800 | 2S1-8001-000 | EXPANDE METAL | |
| MAS1800 | 2C7-2855-000 | SLEEVE,TC A12784A | |
| MAS1800 | 2C7-1677-000 | RING SUPPORT,A11936A | |
| MAS1800 | XB7-1030-082 | SCREW,M3*8 | |
| MAS1800 | XD1-3100-402 | WASHER,M4 | |
| MAS1800 | POWER SUPPLY UNIT 15V/Q-120C | ||
| MAS1800 | 2C7-1476-000 | Quartz Belljar/A10304a | |
| MAS1800 | PC7-1476-000 | Quartz Belljar/A10304a | |
| MAS1800 | QUARTZ DIFFUSION RING(1800N/P-P-DQ) | ||
| MAS1800 | QUARTZ BASE PLATE(1800N/P-P-Q) | ||
| MAS1800 | A10121A | QUARTZ VAC.RING | |
| MAS1800 | A10123 | QUARTZ PLATE | |
| MAS8000 | O-RING(ULTRA HEAT-PROOF SILICO)P-12 | ||
| MAS8000 | O-RING(ULTRA HEAT-PROOF SILICO)1516-5 | ||
| MAS8000 | O-RING(ULTRA HEAT-PROOF SILICO)V-40 | ||
| MAS8000 | 2T3-1086-000 | O-RING AS568-326(VITON) | |
| MAS8000 | 2H5-0060-000 | CONTROLLER,HEATER | |
| MAS8000 | Temp Controller CB400FK07-V*AF-NN/A/Y(RKC) | ||
| MAS8000 | 2T3-0210-000 | O-RING AS568-263,KALREZ BLK | |
| MAS8000 | PH0-4098-000 | ROBOT SENSOR(EE-SX673) | |
| MAS8000 | SOLENOID VALVE 111E1-PS DC24V(KOGANEI) | ||
| MAS8000 | 2C7-2406-000 | BOLT SE50137-A825 | |
| MAS8000 | 2C7-2484-000 | PLASTIC HINGE | |
| MAS8000 | 2C7-4001-000 | PIN,A16101A-02 | |
| MAS8000 | 2C7-4101-030 | WAFER GUIDE,A16201A-03 | |
| MAS8000 | 47213-C97-3301-01 | THERMO COUPLE, | |
| MAS8000 | 2T3-0208-000 | O-RING P49 / (VITON) | |
| MAS8000 | 2H4-0169-000 | DIGITAL OUTPUT | |
| MAS8000 | PC7-2355-000E | Ring,Gas(A) | |
| MAS8000 | A16132A-04 | INNER RING(MIDDLE), | |
| MAS8000 | A16616A | INNER RING(UPPER), | |
| MAS8000 | A16617A | INNER RING(LOWER), | |
| MAS8000 | 2C7-4513-000 | QUARTZ PLATE 200MM PROX | |
| リストに無い型番もお問い合わせ下さい。 | |||