Ebara
	使用装置	Partｓ　Number	品名
	F-REX 200	0300-1110	O-RING-DDF3 TRAVEL HOUSING/0300-1110
	F-REX 200	0300-1104	O-RING-HEAD ASSEMBLY H V-2.1
	F-REX 200		O-RING-TOP MEMBRANE CLAMP H V-2.1
	F-REX 200	945-00020-00	HALOGEN LAMP HLX64621
	F-REX 200	CEPO11-ZAB1210	DRILL DIAMETER 0.5MM
	F-REX 200	CEPO11-ZAB1220	DRILL DIAMETER 0.7MM
	F-REX 200	CEPO22-BLB0230	THIM 0.11MM
	F-REX 200	CEPO11-VFB0050	SPOOL ASSY
	F-REX 200		3 WAY PNEUMATIC VALVE /VC-3T-3A(SURPASS)
	F-REX 200	CEP022-BLP0380	NEWEST SHIM 0.03MM
	F-REX 200	CEP022-BLP0390	NEWEST SHIM 0.05MM
	F-REX 200	CEP022-BLP0400	NEWEST SHIM 0.1MM
	F-REX 200	U-07018-21	PUMP HEAD SS ROTOR/ I/P 73
	F-REX 200	CEP022-DJ20510	AC SERVO MOTOR OF ROLLER
	F-REX 200	C-1124-046-0001	Pencilstage lowerbearing
	F-REX 200	C-1124-045-0001	Pencilstage upperbearing
	F-REX 200	CEPO11-BE91300	B.S.P Backside controller
	F-REX 200	C-5208-008-0011	校正用電子スケール(KG)
	F-REX 200	C-1210-163-0301	O-ring(大)
	F-REX 200	0020-78177	GASKET,ROBOT BLADE
	F-REX 200	0020-78957	BLADDER,DECHUCK
	F-REX 200		Gripper Cylinder / MHKL2-20C1S
	F-REX 200	0040-77343	Flexure(for conditioner)
	F-REX 200	0020-79161	SEAL (for conditioner)
	F-REX 200	3300-04815	/L型for W+Head
	F-REX 200	0140-78193	MX010 HEAD　Digital　Single　Cable
	F-REX 200	3700-01568	O-RING ID 1.487 CSD .103V
	F-REX 200	3700-01632	O-RING ID 2.987 CSD .103V
	F-REX 200	C-5126-016-0001	PRESSURE SENSOR(TOPRING)
	PUMP	A55101054	D150S HEATER UNIT COMPLETE
	PUMP	A55101049	HEATER:130mm;31WATTS
	PUMP	A55101048	HEATER:50mm;12WATTS
	PUMP	A55101050	HEATER:210mm;50WATTS
	PUMP	A55101060	HEATER:80mm;24WATTS
	PUMP	A55001080	THERMOCOUPLE ASSEMBLY
	PUMP	A55101026	1"3-WAY BALL VALVE ASSEMBLY
	PUMP	A55101014	END POINT MOIVITOR PUMP/NF11
	PUMP		BALL VALVE(FLANGE含む)
	PUMP	A5510 1020	CAL 3200 U/TEMP.CONTROLLER
	PUMP	A5510 1020	CAL 3200 U/TEMP.CONTROLLER
	PUMP	A5510 1022	CAL 3200 L/TEMP.CONTROLLER
	PUMP	A55-01-015	1"3-WAY BALL VALVE SEAL
	PUMP	A551-01-006	ENCLOSURE THERMAL FUSE
	PUMP		HEATER THERMAL FUSE/OPENING TEMPERATURE
	PUMP		NW50 L/L BELLOWS FOR HPS/VB-N-50-HPS
	リストに無い型番もお問い合わせ下さい。