| HITACHI | |||
| 使用装置 | Partｓ Number | 品名 | |
| M501A | 4-819815-01 | RETAINER | |
| M501A | RM-2424S | 2-PH STEPPING MOTOR /(OF) | |
| M501A | MFL-25 8*8 (HITACHI) | ||
| M501A | 485CV-O2-30CCM | MFC FC-485CV-2,O2,30CCM | |
| M501A | LL/UL AIR CYLINDER/CDQ2B140C-P0064-XC11 | ||
| M501A | 2-823753-*A | FLEXUBLE TUBE | |
| M501A | 3-832746-05 | SOCKET HEAD SCREW M4×8 | |
| M501A | 3-840318-12 | STOCKET HEAD SCREW M4×65 | |
| M501A | 3-830259-05 | NUT M6 | |
| M501A | 3-841184-01 | BELLOWS | |
| M501A | 3-829569-13 | SOCKET HEAD SCREW M3×20 | |
| M501A | 3-829571-02 | WASHER,SPRING M3 | |
| M501A | 3-829571-02 | WASHER,SPRING M3 | |
| M501A | 3-829569-11 | SOCHET HEAD SCREW | |
| M501A | 3-829570-02 | WASHER,PLAIN M3 | |
| M501A | 2-821302-02 | TRANSFER TUBE | |
| M501A | 3-829569-03 | SOCKET HEAD SCREW M3X6 | |
| M501A | 3-844213-02 | O-RING AS568A-383 D2270 | |
| M501A | 3-844213-01 | O-RING AS568A-375 D2270 | |
| M501A | POWER SUPPLY 113B-2-JSP033-94(MKS) | ||
| M501A | VJ3000-22-1 | SOLENOID VALVE ベース | |
| M501A | S3-90693-01 | CPU BOARD | |
| M501A | SAMPO 15INCH MONITOR | ||
| M501A | 2-826194-*C | ELECTRODE HEAD | |
| M501A | 3-825593-02 | RF POWER GENERATOR ASSEMBLY | |
| M501A | 2-820987-02 | PRINTED CIRCUIT BOARD | |
| M501A | 4-814342-01 | BASE | |
| M501A | 3-821837-02 | CABLE FITTING | |
| M501A | 4-821985-01 | JOINT | |
| M501A | 1-819529-02-*B | PRINTED CIRCUIT BOARD | |
| M501A | 3-838400-01 | HOLDER(COVER) | |
| M501A | 3-838401-01 | CAP,E-CHUCK COVER | |
| M501A | 3-838401-01 | CAP,E-CHUCK COVER | |
| M501A | OEC-0001P | CAP(PIN) /(SCH) | |
| M501A | 4-820498-02 | SPACER,FIBER用 | |
| M501A | 3-837467-01 | O-RING BLOCK | |
| M501A | 3-837467-01 | O-RING | |
| M501A | 3-827676-15 | O-RING(V380 VITON) | |
| M501A | 3-827676-16 | O-RING(V430 VITON) | |
| M501A | 3-827676-18 | O-RING(V530 VITON) | |
| M501A | O-RING(UL,L)AS568A-267 VITON | ||
| M501A | 3-837424-02 | O-RING,AS568A-376 VITON BLK | |
| M501A | (72-EM-0080)O-RING,AS568A-268 VITON | ||
| M501A | 2-819492-*A | BASE FLANGE | |
| M501A | 2-820392-01 | WAVE GUIDE | |
| M501A | 3-834066-01 | SHEET | |
| M501A | 3-832746-01 | SOCKET HEAD SCREW | |
| M501A | 3-832746-02 | SOCKET HEAD SCREW | |
| M501A | 3-827676-06 | O-RING V70 | |
| M501A | 3-829224-10 | O-RING P28 (NBR90) / VITON | |
| M501A | 3-822288-02 | (70-XX-1640)O-RING P25 BLOCK | |
| M501A | 3-827676-13 | O-RING V275 VITON | |
| M501A | 3-827676-13 | O-RING V275 VITON | |
| M501A | 3-816404-*C | FLXIBLE TUBE 321-4-X-6DFR | |
| M501A | 3-824007-*C | FLXIBLE TUBE 321-8-X-6FMR | |
| M501A | 3-824007-*A | FLXIBLE TUBE 321-8-X-1FMR | |
| M501A | 3-824007-*A | FLXIBLE TUBE 321-8-X-1FMR | |
| M501A | 3-829570-06 | WASHER,PLAIN,M8 | |
| M501A | S3-85130-*A | ENCODER FOR CASSETTE | |
| M501A | 2-826627-05 | PHOTO SENSOR HPJ-T21 9740E | |
| M501A | 3-837428-12 | O-RING AS568-276 VITON BLK | |
| M501A | 4-820960-03 | O-RING NW40/100001381 | |
| M501A | 3-829303-05 | SOCKET HEAD SCREW M4×8 | |
| M501A | S2-87171-*A | ENCODER | |
| M501A | 3-842802-01 | LCD BACK LIGHT | |
| M501A | 3-827674-02 | O-RING G135 VITON | |
| M501A | 3-827674-02 | O-RING G135 VITON | |
| M501A | 3-816468-03 | VCR GASKET SS-12-VCR-2-GR | |
| M501A | 4-819815-01 | RETAINER | |
| M501A | SHIELD LINE(ETCH CHAMBER BASE FLANGE) | ||
| M501A | 3-821995-*A | WAVE LEAKAGE DELECTOR | |
| M501A | 2-822720-01 | DIGITAL MULTI RECORDER | |
| M501A | 2-822720-03 | INTERFACE UNIT | |
| M501A | 2-822720-04 | ALARM UNIT | |
| M501A | 2-821429-*C | INSULATION PLUG CERAMICS | |
| M501A | 2-821429-*D | INSULATION PLUG CERAMICS | |
| M501A | INSULATION RING(ELECTRODE,CERAMICS) | ||
| M501A | 3-823123-08 | O-RING(P14 PERFLUORO) | |
| M501A | BUFFER ROOM ROBOT ARM(VACUUM ROBOT) | ||
| M501A | 4-820504-02 | RING,4T/INSULATION PLATE(上) | |
| M501A | 3-834423-01 | EARTH SHIELD/SUS304 | |
| M501A | 3-837628-01 | LCD BACK LIGHT | |
| M501A | 1-812643-02 | BASE | |
| M501A | 2-822079-01 | LOBBY RINSE COVER-2 | |
| M501A | 1-814012-*A | BASE FLANGE | |
| M501A | 2-818898-01 | SLEEVE | |
| M501A | 2-821400-01 | RING,SUSF316 | |
| M501A | 2-818899-01 | RING GATE VALVE | |
| M501A | 3-829303-10 | SOCKET HEAD SCREW M4×14 | |
| M501A | 4-819349-01 | (EPD)SHEET(TEFLON) | |
| M501A | 4-815612-01 | METAL O-RING,A00597AG | |
| M501A | 192115411 | ISO 160 CENTERING/HTC | |
| M501A | QUARTZ PLATE(MICROWAVE PASS TO CHAMBER) | ||
| M501A | INSULATION RING/ETCH ELECTRODE (OUTER) | ||
| M531A | D003010284 | PERFLUORO O-RING AS568 2-381 | |
| M531A | D003010284 | PERFLUORO O-RING AS568 2-381 | |
| M600 | 1-815719-01 | HEAD PIECE(M600) | |
| M600 | 3-852655-01 | M600 MFC GASKET | |
| M600 | 3-837902-01 | GAS RING (M600) | |
| M600 | 3-838183-01 | GAS RING (M600) | |
| M600 | 1-820580-*B | GATE VALVE (M600) | |
| M600 | 2-826599-01 | BUFFER ROOM ROBOT ARM(M600) | |
| M600 | 3-827676-21 | O-RING V690 VITON BLK(M600) | |
| S9220 | 567-5312 | OPERATION PANEL ASSY | |
| S9220 | 271-0011 | CIRCUIT BOARD ASSY EBSI 100 | |
| S9220 | 568-5538 | CIRCUIT BOARD ASSY IP AMP | |
| S9220 | 568-5569 | CIRCUIT BOARD ASSY NPSDAMP | |
| S9220 | 567-0924 | SENSOR MOUNT ASSY | |
| S9220 | 567-0776 | AIR VALVE ASSY | |
| S9220 | 568-5547 | CIRCUIT BOARD ASSY LAMP CN | |
| S9220 | 567-1188 | REED BALL SCREW | |
| S9220 | 567-6354 | AV1 OPEN/CLOSE SENSOR | |
| S9220 | 567-0211 | OM DRIVE BOARD | |
| S9220 | 567-6357 | OM LAMP POWER SUPPLY | |
| S9220 | 567-3566 | WT (ROBOT & OF)ELECTORIC VALVE | |
| S9220 | 567-0369 | ROBOT CONTROLLER | |
| S9220 | 568-4568 | LOADER MOTOR | |
| S9220 | 567-3215 | VACUUM 電磁弁 | |
| S9220 | 568-5321 | STAGE WAFER SENSOR | |
| S9220 | 568-0354 | EV3-3 ELECTRONIC VALVE | |
| S9220 | 568-8632 | LOADER CONTROL SENSOR | |
| S9220 | 567-6310 | MICROSCPE POWER SUPPLY | |
| S9220 | 567-5326 | ION PUMP POWER SUPPLY | |
| S9220 | 567-5221 | DISPLAY POWER SUPPLY | |
| S9220 | 568-5752 | Port mapping Sensor | |
| S9220 | 568-5552 | Circuit Board Assy Senscn | |
| S9220 | 567-0094 | DRIVING CHAMER ASSY X | |
| S9220 | 567-0020 | Robot Unit | |
| S9220 | x axis drive wire(UTC-820)/MECS-0057 | ||
| S9220 | STANDARD REFERNACE SAMPLE | ||
| S9220 | 567-3374 | ROAD LOCK ARM | |
| S9220 | R629187 | MO DISK DRIVE | |
| S9220 | 567-0782 | ROLLER HOLDER ASSY (R) | |
| S9220 | 567-0782 | ROLLER HOLDER ASSY (R) | |
| S9220 | 561-1138 | ANTI-STATIC ARM(8INCH) | |
| S9220 | 1 INCH CENTERING O-RING | ||
| S9220 | 567-0704 | HOLDER RAIL R1 | |
| S9220 | 567-0705 | HOLDER RAIL ASSY L1 | |
| S9220 | 567-0703-Z | UTC820Z Z DRIVER PCB | |
| S9220 | L456908 | O-RING | |
| S9220 | 567-1763 | ARM BASE A | |
| S9220 | 567-1764 | ARM BASE B | |
| S9220 | 567-0851 | CABLE(HV) | |
| S9220 | 567-0703-X | UTC820Z X DRIVER PCB | |
| S9220 | L456105-05 | O-RING FPM P-8 | |
| S9220 | L456759-05 | O-RING AS568-110(AV2) | |
| S9220 | 560-0330 | LID(FOR LOADER) | |
| S9220 | 567-0383 | HOLDER ASSY | |
| S9220 | 567-1137 | MAGNETIC SEAL(B) | |
| S9220 | MO DISK DRIVER,SCSI INTERFACE/DISK-4500+ | ||
| S9220 | L456913 | O-RING FPM AS568-433 | |
| S9220 | L456816 | O-RING FPM AS568-226 | |
| S9220 | 567-0767 | CYLINDER | |
| S9220 | 554-4644 | MD GREASE | |
| S9220 | 567-0040 | MICROSCPE ASSY | |
| S9220 | 567-0052 | OBJECTIVE LENS APERTURE ASSY H | |
| S9220 | 567-0651 | EVAC PANEL ASSY | |
| S9220 | 567-0709 | AIR LOCK ASSY | |
| S9220 | 567-0726 | 5-PHASE DRIVER ASSY (X) | |
| S9220 | 567-0781 | ROLLER HOLDER ASSY (L) | |
| S9220 | 567-0785 | CHUCK UN-CHUCK ASSY | |
| S9220 | 567-0787 | ROTARY LEVER ASSY | |
| S9220 | 567-5100 | VME UNIT | |
| S9220 | 567-5131 | STAGE POWER SUPPLY ASSY | |
| S9220 | 567-6543 | WORK STATION | |
| S9220 | 568-5513 | CIRCUIT BOARD ASSY LENS PS | |
| S9220 | 568-5532 | CIRCUIT BOARD ASSY CHICK PS | |
| S9220 | 568-5534 | CIRCUIT BOARD ASSY EVCN | |
| S9220 | 568-5535 | CIRCUIT BOARD ASSY VSCN | |
| S9220 | 568-5540 | CIRCUIT BOARD ASSY C. PREAMP | |
| S9220 | 568-5562 | CIRCUIT BOARD ASSY COL-CN | |
| S9220 | 567-0842 | PALETTE U/D ASSY | |
| S9220 | 566-5541 | CIRCUIT BOARD ASSY SE AMP | |
| S9220 | 568-5566 | CIRCUIT BOARD ASSYAALARMIF | |
| S9220 | 567-0700 | BEAM SENSOR | |
| S9220 | 567-0969 | ELECTROMAGNETIC VALVE(VF) | |
| S9220 | 567-5102 | PRINTER UNIT | |
| S9220 | 568-5514 | CIRCUIT BOARD ASSY MHV | |
| S9220 | 567-0727 | 5-PHASE DRIVER ASSY (Y) | |
| S9220 | 567-0036 | CERAMICS HAND WITH CASE(CTOC) | |
| S9220 | 567-0766 | SENSOR(AV3) | |
| U612 | O-RING VITON/AS568-256(BUNA-256/S35S0412 | ||
| U612 | 715-028532-002 | RING,COOLING,8" ELECTRODE/ | |
| U612 | 795-002627-001 | FILTER,OPTICAL,405 nm | |
| U612 | 715-443178-001 | R EDGE HOT | |
| U612 | 734-009250-001 | O-RING AS568-159 VITON | |
| U612 | AL DISCHARGE BLOCK/1-A01748-*A | ||
| U612 | 2-827265-05 | GROUNDED ELECTRODE | |
| U612 | 739-098593-0 | BONNET SEAL(PENDULUM VALVE) | |
| U612 | LOCKING R SEAL KIT VITON(PENDULUM VALVE) | ||
| U612 | 715-330092-006 | CAP,GAS RING,TRI-HEAD | |
| U612 | 2-810512-01 | PHOTMULTIPLIER | |
| U612 | 715-550174-001 | INDEXレベルゲージ合成用 | |
| U612 | 605-093605-001 | DGTL,I/O xVME-240 | |
| U612 | 734-550525-003 | ALINGER O-RING | |
| U612 | 3-839189-01 | OPERATION VALVE CLB4RRVC234Y | |
| U612 | 3-852586-02 | MATCH CONTROLLER | |
| U612 | 766-091551-002 | LIFT PIN EV Valve | |
| U612 | SYJ314M-5LOZ 電磁弁 | ||
| U612 | 810-803225-001 | PCB,ADAPTER BD#2,DMFC | |
| U612 | 810-803226-001 | PCB,ADAPTER BD#3.D,FC | |
| U612 | 734-022231-160 | WINDOW O-RING PERLAST | |
| U612 | HEATER POWER UNIT | ||
| U612 | AMC-0607MA-20 | MICROWAVE CONROLLER | |
| U612 | ZDK-916 | RF TNNER CONTROLLER | |
| U612 | LP-1000-400K | RF POWER GENERATOR | |
| U612 | CHAMBER PLATE | ||
| U612 | 734-061280-264 | GATE DOOR INNER | |
| U612 | 2-832616-*B | SHOWER PLATE | |
| U612 | 4-829799-01 | 42-10-0021)VIEW PORT | |
| U612 | 3-847093-02 | QUARTZ PLATE | |
| リストに無い型番もお問い合わせ下さい。 | |||