| KLA | |||
| 使用装置 | Partｓ Number | 品名 | |
| D-7000 | 28-0086 | DESICCANT CARTRIDGE | |
| D-7000 | 54-0150 | PCA, CONT /DRIVER, SERVO MOTOR | |
| D-7000 | 29-0163 | MIRROR PARABOLOID /(TENCOR) | |
| D-7000 | 96-0041 | VALVE,VAC,3WAY,24VDC,1/8NPT | |
| D-7000 | 96-0015 | H2 Handler Aligner Vacuum Valve | |
| D-7000 | 54-0095 | PCA,Dual Stepper Driver | |
| D-7000 | 29-013586 | UV LAMP FOR OP3290 | |
| D-7000 | 18-013072 | Detector Support assembly | |
| D-7000 | 55-0234 | CBL ASSY.THETA ASSY-SIDE CONN | |
| D-7000 | 18-013282 | PMT Assembly,UV | |
| D-7000 | 45-016469 | PRE-ALIGNER Equipe,PRE-201 | |
| D-7000 | 50-0110 | LAMP(HALOGEN) | |
| D-7000 | 0040437-000. | ASSY DS-5 STYLUS | |
| KLA2135 | 1207005 | USHIO LAMP(UXM-S200KL) | |
| KLA2135 | 271900 | REFLECTOR,TILT,CCM | |
| KLA2135 | 0031778-000 | ASSY,TESTED,RIO2 BOARD | |
| KLA2135 | 172340 | BELT,TMG,.080P,120T,.25W,KEVLR | |
| KLA2135 | 300-652872-00 | BELT TIMING.080 PCH 3/8 WD | |
| KLA2135 | SUFERSCAN 6220 ROBOT ARM/NA | ||
| KLA5100 | 710-450886-00 | PAT Light controller | |
| KLA5100 | 300-403299-00 | Timing Belt | |
| KLA5100 | 655-473150-0 | 200MM RHC Theta Sensor Base | |
| KLA5100 | 30203670 | 53XX Vacuum Sensor | |
| KLA5100 | 070-403592-00 | MSEC Power Supply | |
| KLA5100 | 560-452389-00 | Klass Unit Valve | |
| KLA5100 | 910-404582-00 | HV Drive Board | |
| KLA5100 | 3806901009 | HW Board | |
| KLA5100 | 710-404284-00 | AT Drive Board | |
| KLA5100 | 23011-004 | Switch Drive Board | |
| KLA5100 | 740-402385-01 | Cassette Unit | |
| KLA5100 | 740-405056-00 | MSEC PC | |
| KLA5100 | 665-400264-001 | THETA BELT FOR 51XX | |
| KLA5100 | 061-404058-00 | ENCODER OPT ROTRARY HP | |
| KLA5100 | 070-401679-00 | 48V POWER SUPPLY | |
| KLA5100 | 560-451655-00 | cassette Dry air value | |
| KLA5100 | 560-451655-00 | cassette Dry air value | |
| KLA5100 | 575-403193-00 | ROTRAY,ACTUATOR | |
| KLA5100 | 730-450138-00 | MOTOR PHI EXT | |
| KLA5100 | 730-450135-00 | LIGHT MOTOR EXT. | |
| KLA5100 | 0042364-001 | SHUTTER SUBASSEMBLY | |
| KLA5100 | 655-470015-00 | TIP FOR PZT "W" | |
| KLA5100 | 070-480158-00 | HALOGEN POWER SUPPLY | |
| KLA5100 | 501-400068-00 | LIQ.LIGHT GUIDE 1M #77554 | |
| KLA5100 | 0000824-002 | ASSY,FINGER,FORK,200MM | |
| KLA5100 | 710-400363-00 | P2M MTHR BD ASSY | |
| KLA5100 | 710-404146-00 | A.L EXTENTION BD | |
| KLA5100 | 710-400159-00 | DIGITIZER MARTROX VIP 1024 | |
| KLA5100 | 710-451127-00 | NEW AIRFLOW SENSOR BD ASSY | |
| KLA5100 | 710-400248-00 | X-THETA BRDG ASSY | |
| KLA5100 | 030-404421-00 | KLASS CCD | |
| KLA5100 | 955004-C | LAMP align board | |
| KLA5100 | 070-404205-00 | VME POWER SUPPLY | |
| KLA5100 | 23000-109 | Schroff | |
| KLA5100 | 9404111-D | 51XX PZT controller board | |
| KLA5100 | 655-473179-00 | 51XX finger | |
| RS35 | STYLUS /5umR | ||
| RS35 | 665102 | 2.5 MICRON RADIUS FOR D8000 | |
| RS35 | 49-0004 | Stage Motor Belt 1/4W, .08Pitch | |
| リストに無い型番もお問い合わせ下さい。 | |||