| Sumitomo Metal OZ4000 (Etch) | |||
| Parts Number | Description /品名 | Mark | |
| 637-S004803-046 | MICROWAVE OSCILLATOR | ||
| AIR VALVE TYPE:VJ5220-5L-M5(SMC) | |||
| TORBO PUMP N2 PORT | |||
| 853-S012542-001 | HEATING WAFER PLATE | ||
| 637-S04805-006-00 | MAGNETRON | ||
| 637-S4803-001-00 | MAGNETRON | ||
| 639-S05004-002-00 | RF POWER SUPPLY | ||
| 639-S005040-003-01 | RF MATCHING UNIT | ||
| 639-S05002-005-00 | AUTO TUNING CONTROLLER | ||
| 660-S01840-200-00 | ESC POWER SUPPLY | ||
| 660-S001821-008 | COIL POWER SUPPLY | ||
| 665-Y007820-090 | 15INCH CRT TOUCH MONITOR | ||
| HALOGEN LAMP/JCV-100V-100WGSN | |||
| 661-S7056-014-00 | HALOGEN LAMP | ||
| 664-S07658-007-00 | MONCHROMETER | ||
| 664-S07685-002-00 | PHOTOMALTIPLIER CASE | ||
| 664-S07685-003-00 | SIDE VIEW SENSOR/ | ||
| 664-S07685-008-00 | QUARTZ FIBER SUS COVER | ||
| COLER LCD DISPLAY/PD70-FA1Q 15" | |||
| 665-S71778-001-01 | COLOR DISPLAY | ||
| THERMO COUPLE /E52-CA20A D=1 2M | |||
| 666-S9039-015-00 | THERMO COUPLE | ||
| 666-S09039-001-00 | THERMO COUPLE | ||
| 667-S00461-009-00 | FIBER UNIT | ||
| 667-S00461-009-00 | FIBER UNIT | ||
| 667-S00465-005-00 | SIDE VIEW | ||
| 667-S00462-002-0 | SENSOR AMP(KEYENCE,FS2) | ||
| 683-S08950-006-00 | MOTEON CONTROLLER | ||
| 683-S08950-007-00 | CONTROLLER | ||
| 685-S07829-002-00 | TOUCH CONTROLLER | ||
| 694-S008955-002 | ATMOSPHERE3 AXIS ROBOT | ||
| 713-S070782-001-01 | GUIDE TUBE /D-SP1461 | ||
| 713-S070892-001-00 | INSULATOR SPACER | ||
| 713-S070672-001-01 | PIN PLATE | ||
| 713-S070912-001-00 | INSULATED PLATE | ||
| 713-S070612-001-02 | INSULATED BUSH | ||
| 713-S070788-001-02 | CLAMPER GUIDE | ||
| 713-S070638-001-00 | KEY | ||
| 713-S070720-001 | BOLT CAP | ||
| 714-S070328-001-03 | LIGHT PORT COVER -DEPOSITION COVER | ||
| LIGHT PORT ANTI | |||
| 714-S070330-001-02 | PIRANI PORT COVER | ||
| 714-S070332-001-02 | ROUGH VALVEPORT COVER | ||
| 714-S73201-001-01 | EXHAUST PORT COVER | ||
| 714-S73257-001-01 | GATE VALVE ANTI COVER | ||
| 715-S073034-001-01 | THERMO COUPLE SUPPORT | ||
| 715-S070212-001-05 | INNER BELL-JAR | ||
| 715-S073040-001-00 | BELL-JAR HOLDER | ||
| 715-S070161-001-00 | SCREW.GAS RING | ||
| 678-S007320-008 | BELT HEATER | ||
| 716-S070158-001-04 | BELL-JAR PLATE | ||
| 716-Y070158-014-G1 | BELL-JAR PLATE | ||
| CAPACTTANCE MANOMETER /CMX1M1114 | |||
| CAPACTTANCE MANOMETER /CMH4-M11-S06 | |||
| 713-S070767-001 | HOLDER | ||
| 790-S009024-018 | SUPER KNOB | ||
| 715-S074684-001 | POSITIONING PIN | ||
| SCREW,HEXA-SOCKET HEAD CAP(SUMITOMO) | |||
| SCREW,HEXA-SOCKET HEAD CAP (SUMITOMO) | |||
| 716-S070957-001 | ESC HOLDER | ||
| 716-S070768-002-01 | CLAMPER PIN | ||
| 796-S002304 | ION GAUGE CONTROLLER GI-1000 | ||
| 716-S070956-001-E1 | TARGET(QUARTZ) | ||
| 716-S075525-004-01 | CERAMITS PLATE | ||
| 793-S003933-003 | ADAPTIVE PRESSURE CONT. | ||
| 716-S070388-001-01 | VIEW PORT GLASS | ||
| 716-S073232-001-00 | VIEW PORT GLASS | ||
| 716-S071800-001 | SUCKER /(YOKOGAWA) | ||
| 724-S73037-001-00 | SCREW.TC PLACE | ||
| 724-S073036-001-00 | SCREW.BELLJAR SCREW | ||
| 724-S071982-001-00 | VACUUM ROBOT PICK | ||
| 724-S070946-001-E1 | ELECTROSTAIC CHUCK | ||
| 724-Y074058-002 | ELECTROSTATIC CHUCK | ||
| 724-S070926-001-00 | KNOCK OUT PIN | ||
| 733-S233-010-00 | (72-EI-1610)O-RING P10 (VITON) | ||
| (72-ES-0460)O-RING AS568-118 VITON BLOCK | |||
| O-RING AS568-112 VITON WHITE | |||
| (70-YY-1500)O-RING P14(VITON) | |||
| 733-S223-014-00 | O-RING P14 VITON BLOCK | ||
| 733-S00223-024-00 | O-RING P24 VITON BLOCK | ||
| 733-S00213-105-00 | O-RING G105 VITON BLK/ | ||
| 733-S223-009-00 | (72-EI-1980)O-RING P9 VITON BLK | ||
| 733-S00223-008-00 | (70-YY-1090) O-RING P8 VITON | ||
| 733-S09003-015-00 | O-RING HS70 BLK | ||
| 733-S09003-028-00 | O-RING HS70/BLOCK VITON | ||
| 733-S00223-026-00 | O-RING P26 CHEMRAZ BLK | ||
| 733-S09002-022-00 | O-RING P40 PERFLUORO | ||
| 733-S00213-060-00 | O-RING G60 VITON BLOCK | ||
| 733-S00249-003-00 | O-RING NW25 BLK | ||
| 733-S00223-056-00 | O-RING P56 VITON BLOCK/33-S223-056-00 | ||
| 733-S00223-048-00 | O-RING P48 VITON BLOCK | ||
| 734-S9002-035-00 | O-RING AS568-362 PERFLUORO | ||
| 734-S243-263-00 | O-RING AS568-263 VITON BLOCK | ||
| 733-S9002-063-00 | (72-EI-0330)O-RING AS568-280 PERFLUORO | ||
| 733-S9002-064-00 | O-RING AS568-281 PERFLUORO WHITE | ||
| 734-S243-387-00 | (70-XX-0350)O-RING AS568-387 VITON BLOCK | ||
| 734-S9002-070-00 | (72-EV-1330)O-RING AS568-383 PERFLUORO | ||
| 734-S9003-027-00 | O-RING AS568-362 VITON BLOCK | ||
| 734-S243-380-00 | O-RING AS568-380 VITON BLOCK | ||
| 734-S243-376-00 | (85-EWL0580)O-RING AS568-376 VITON BLOCK | ||
| 734-S243-272-00 | O-RING AS568-272 VITON BLOCK | ||
| 734-S243-313-00 | O-RING AS568-313 VITON BLOCK | ||
| 734-S243-002-00 | O-RING AS568-002 VITON BLOCK | ||
| 734-S243-362-00 | O-RING AS568-362 VITON BLOCK | ||
| 734-S243-330-00 | O-RING AS568-330 VITON BLOCK | ||
| 734-S9002-054-00 | O-RING /AS568-457 PERFLUORO | ||
| 739-S09053-002-00 | SHIELD LINE1 | ||
| 768-S2370-002-00 | VACUUM SWITCH PS8-102V-T 6D3 | ||
| 778-S001350-010 | PUMP UNIT(P32) | ||
| 778-S71601-002-00 | CHILLER | ||
| 796-S2256-001-00 | (72-EI-0280)PIRANI GAUGE UNIT | ||
| 796-S2251-001-00 | (70-XX-2680)PIRANI GAUGE/WP-01(ULVAC) | ||
| 796-S2300-001-00 | IONIZATION GAUGE /WI-T18/VACUUM GAUGE | ||
| 796-S02360-005-00 | CAPACITANCE MANOMETER/ | ||
| 796-S2924-001-0 | AIR OPERATE VALVE/AVB512-25K-DC3(CKD) | ||
| 796-S2924-007-00 | AIR OPERATE VALVE/AVB612-X0011(CKD) | ||
| 796-S2924-003-00 | AIR OPERATE VALVE/AGD11-8R-5(CKD) | ||
| 796-S2470-320-00 | MINIIN-LINE GAS FILTER/1/4 GASKET SEAL | ||
| 796-S2762-711-00 | DIAPHRAM VALVE/FPR-UDDF-71-6.35-2-NL | ||
| 796-S002153-006 | TURBO MOLECULAR PUMP | ||
| 796-S02951-006-00 | SEAL KIT | ||
| 796-S2924-014-00 | 2 PORT VALVE/USB3-6-1-E/DC24V(CKD) | ||
| 796-S2924-012-00 | 3 PORT SOLENOID VALVE/USG3-X0591/DC24V | ||
| MFC/FC-770AC 100SCCM N2 20C1791(Area) | |||
| 797-S4000-120-00 | MASS FLOW CONTROLLER | ||
| MFC/FC-770AC 20SCCM N2 20C1787(Area) | |||
| 797-S4000-030-00 | MASS FLOW CONTROLLER | ||
| MFC/FC-770AC 50SCCM CHF3 20C1792(Area) | |||
| 797-S4000-036-00 | MASS FLOW CONTROLLER | ||
| MFC/FC-770AC 50SCCM C4F8 20C1793(Area) | |||
| 797-S4000-006-00 | MASS FLOW CONTROLLER | ||
| MFC/FC-770AC 50SCCM CH2F2 20C1788(Area) | |||
| 797-S4000-052-00 | MASS FLOW CONTROLLER | ||
| 797-S04000-051-00 | MASS FLOW CONTROLLER | ||
| 839-S070609-001-00 | RF INLET FLANGE | ||
| 839-S070868-002-01 | CLAMPER BELLOWS | ||
| 853-S072935-001-02 | KNOCK OUT CYLINDER | ||
| 853-S073449-001-00 | VACUUM 2 AXIS ROBOT | ||
| 853-S008951-002 | WAFER ALIGNMENT SYSTEM | ||
| 854-S071976-001 | ATMOSPHERE ROBOT PICK | ||
| 960-S9502-001-00 | (70-YY-0170) /FLOLINART FC-77 | ||
| 796-S002957-007 | BEARING | ||
| 996-S130016-001-00 | BEARING | ||
| 796-S002957-006-00 | CRANK BOLT | ||
| 996-S130015-001-00 | CRANK BOLT | ||
| 796-S002957-008-00 | BALL | ||
| 996-S130017-001-00 | BALL | ||
| 734-S9002-063-00 | O-RING AS568-280 PERFLUORO | ||
| O-RING | |||
| 734-S9002-064-00 | O-RING AS568-281 PERFLUORO | ||
| O-RING | |||
| 734-S9002-070-00 | O-RING AS568-383 PERFLUORO | ||
| O-RING | |||
| (70-XX-0350)O-RING AS568-387 VITON BLOCK | |||
| (72-EI-1980)O-RING P9 VITON BLOCK | |||
| 739-009053-001 | SHIELD LINE 2 | ||
| 668-S008060-00 | BNL SOCKET | ||
| 668-S008050-001 | BLN SOCKET | ||
| 733-S009002-005 | O-RING P-40(PERFLUORO) | ||
| 728-S000105-012 | BOLT /(SUMITOMO) | ||
| O-RING AS568-227 VITON P-TRA/D002010154 | |||
| (70-XX-2060)O-RING AS568-216 VITON BLOCK | |||
| (70-XX-0330)O-RING AS568-207 VITON BLOCK | |||
| 715-S073908-001( | BELLOWS HOUSING /SMI) | ||
| SCREW,HEXA-SOCKET HEAD CAP(SMI) | |||
| 718-S073906-001 | BOLT /(SMI) | ||
| 853-S071831-001 | GATE VALVE BELLOWS | ||
| 715-S070212-006 | INNER BELL-JAR /(SUMI) | ||
| 715-S070212-007 | INNER BELL-JAR /(SUMI) | ||
| 715-S070212-009 | INNER BELL-JAR /(SUMI) | ||
| 715-S073040-005 | BELL-JAR HOLDER /(SUMI) | ||
| 715-S073034-003 | THERMO COUPLE SUPPORT | ||
| 853-S078065-002 | THERMO COUPLE | ||
| 713-S070611-001 | Guide Pin / (Sumitomo) | ||
| 713-S070767-003 | GCLAMPER HOLDER(D-SP1466) | ||
| 713-S070780-003 | STOPPER /(SUMITOMO) | ||
| CLAMPER SPRING /715-S070783-003 | |||
| 713-S070631-004 | SPRING HOLDER /(SUMITOMO) | ||
| 685-007830-054 | FA PERSONAL COMPUTER | ||
| 666-Y009039-356 | THERMO COUPLE /N-P-N | ||
| 778-S001502-006 | THERMISTOR /(SUMITO) | ||
| 715-S070621-001 | PIN | ||
| SM-68S-S006906 | TEMP.CONTROLLER(REX-D100) | ||
| 713-0070669-001 | INSULATED COVER | ||
| BARREL PERFLUORO MPW LIFT PIN COVER | |||
| 685-S007830-090 | PC PERSONAL COMPUTER | ||
| 666-S009039-009-00 | THERMO COUPLE | ||
| 666-S009039-035-00 | CONNECTOR READ | ||
| 637-S004813-003 | MICROWARE TUNER DRIVER | ||
| AIR CYLINDER OF ALIGMENT JDAS16*10-B(HS) | |||
| ACTUATOR/232851 | |||
| 694-S008955-051 | VACUUM 2 AXIS ROBOT | ||
| Relay/K3FK-TS-24-B | |||
| 645-S006950-015 | PLC CPU | ||
| 796-S002162-013-00 | TMP CONTROLLER(EV) | ||
| EV M.W.CONTROLLER/MKN-202-3S3G-OSC | |||
| OSAKA TURBO PUMP S/N:568 | |||
| ＊ 価格はお問い合わせ下さい ＊ | |||