ASTEX	修理　・　オーバーホール　リスト
			種類 / 品名	メーカー	型式・P/N	備考
			Microwave Generator	Astex	ARX-X491	AMAT　P/N:0190-00398
			Microwave Generator	Astex	AX2115	Astex uW generator
			Microwave Generator	Astex	AX2518	MKS smart power
			Microwave Generator	Astex	AX2530	MKS smart power
			Microwave Generator	Astex	AX2560	MKS smart power
			Microwave Generator	Astex	FI10002	MKS 1.5~3KW Magnetron Head
			Microwave Generator	Astex	SXRHC	MKS 1.5~3KW Magnetron Head
			Microwave Generator	Astex	FI20061	MKS 1.5~3KW Magnetron Head
			Microwave Generator	Astex	FI20194	MKS 1.5~3KW Magnetron Head
			Microwave Generator	Astex	FI20162	MKS 1.5~3KW Magnetron Head
			Microwave Generator	Astex	FI20045	MKS Smart match
			Microwave Generator	Astex	FI20606	MKS Smart match
			Microwave Generator	Astex	FI20634	MKS Smart match
			Microwave Generator	Astex	FI10001	MKS Smart match
			Microwave Generator	Astex	AX9018	MKS Smart match
			Microwave Generator	Astex	AX9030	MKS Smart match
			Microwave Generator	Astex	AX3060	MKS Smart match
			リストに無い型番もご相談下さい。