ロボット 修理 オーバーホール リスト
リストに無いメーカー ・ 型番も取り扱っておりますのでご相談下さい。
Brooks PRI
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| Type | 型 式 | P / N | 使用装置 |
| Robot | ATM-105 | KLA_OP2000/3290DV ; Thermawave ; August | |
| Robot | ATM-107 | KLA_Tencor | |
| Robot | ATM-107B | ASTI_Sorter | |
| Robot | WTM-107B | IPEC_CMP_776 and Momentum_R1&R2 | |
| Robot | ATM200 | AMAT | |
| Robot | ATM-204 | LAM_Autoload | |
| Robot | ATM-205 | ||
| Robot | ABM-205 | IPEC_CMP_776 and Momentum_R3; Ebara | |
| Robot | ATM-207 | KLA_Tencor | |
| Robot | ATM-305 | Mattson AST-2800 | |
| Robot | ATM-307 | Mattson RTP | |
| Robot | ATM-405 | KLA_ARCHER AIM | |
| Robot | ABM-405 | AMAT_Producer ; AMAT_Quantum; KLA OP | |
| Robot | ATM-407 | KLA_Surfscan, AMAT Producer | |
| Robot | ATM-407-B | GSI製?Wafer Repair System | |
| Robot | ATM-407-2A | LAM | |
| Robot | ABM-407 | KLA_測定装置; Rudolph | |
| Robot | VAC-407 | Varian VIISta 810 | |
| Robot | DBM-2406 | SEZ SP4300, Varian VIISta, FSI ANTARES | |
| Robot | DBM-2407 | SEZ SP4300, Varian VIISta, FSI ANTARES | |
| Robot | DBM-2706 | 300ｍｍIMPLA | |
| Robot | WTM-511 | AMAT-CMP wet | |
| Pre-aligner | PRE-200 | For 8 " Wafer | |
| Pre-aligner | PRE-200B | For 8 " Wafer | |
| Pre-aligner | PRE-201 | For 8 " Wafer | |
| Pre-aligner | PRE-201B | For 8 " Wafer | |
| Pre-aligner | PRE-300 | For 12 " Wafer | |
| Pre-aligner | PRE-300B | For 12 " Wafer | |
| Pre-aligner | PRE-301 | For 12 " Wafer | |
| Pre-aligner | PRE-301B | For 12 " Wafer | |
| ATR-8_NVLS | Novellus_Vector, Inova XT, ECP-300mm | ||
| ATR-8_LAM | LAM_Etch_2300 Exelan | ||
| ATR-7_NVLS | Novellus_ECP-200 mm, Sabre_300mm | ||
| ATR-7_NVLS | Novellus_ECP-200 mm, Sabre_300mm | ||
| ATR-7_Arm set | Novellus_ECP-200 mm, Sabre_300mm | ||
| AQR-7 | Novellus_ECP(Process) 200mm | ||
| AQR-7 | Novellus_ECP(Process) 300mm | ||
| AQR-7 Controller | |||
| AQR-7_Arm Set | Novellus_ECP(Process) | ||
| Traverser | 002-8761-05 | Novellus_CVD | |
| Robot | MTR5 | Novellus | |
| Robot | MTR5 | Lam | |
| Robot | MTR5 Armset | Novellus | |
| Robot | MTR5 Armset | Lam | |
| MAG-7 Armset | Lam_200mm | ||
| MAG-7 Armset | Lam_300mm | ||
| MAG-7 Armset | Novellus_CVD _200mm | ||
| MAG-7 Armset | Novellus_CVD _300mm | ||
| MAG-7 | LAM (DRY） and NOVELLUS(CVD) | ||
| MAG-8 | AMAT Producer_GT | ||
| MAG70 | AKT | ||
| MAG74 | Anelva | ||
| MAG70 Arm set 4300 | AKT 4300 | ||
| MAG70 Arm set 5500 | AKT 5500 | ||
| MAG74 Arm set | Anelva | ||
| Robot | MAG-7 | Novellus_Concept 2, 3 | |
| Robot | MAG-7 | Lam_2300 | |
Kensington
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| Type | 型 式 | P / N | 使用装置 |
| TP-420 | Thermawave | ||
| 3軸Robot | AMAT_CVD Producer S | ||
| 5軸Robot | AMAT_CMP FI | ||
| ALIGNER | AMAT FI | ||
| RobotWFH4D | Nano 8000 | ||
| Controller 4000D | Nano 8000 | ||
| 3軸Controller R1 | AMAT_FI | ||
| 3軸Controller R2 | AMAT_FI | ||
| 5軸Controller | AMAT_CMP | ||
KAWASAKI
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| Type | 型 式 | P / N | 使用装置 |
| Robot | 3NS410B | AMAT_Producer SE, Producer eXT | |
| Robot | 3NS411B | AMAT_Reflexion FI | |
| Robot | 3NS511C | AMAT_Reflexion Wet | |
| Robot | 3NX510B | AMAT_FI Producer GT | |
| Robot | 3NX520B | KLA | |
| Robot | 3NX540B | AMAT_FI Producer eXT | |
| Robot | 3NX550B | KLA_FX-100 | |
| Controller | 30C61C | AMAT_FI | |
| Controller | 30C61D | AMAT_FI | |
| Controller | 30C61E | AMAT_FI | |
| Controller | 30D61I | AMAT_LK Reflexion Controller | |
| Pre-Aligner | AMAT_FI Centura | ||
| Arm | TS520 | DNS_Aquaspin SS3000 | |
| Arm | TS310 | DNS_Aquaspin SS3000 | |
| Arm | TS220 | DNS_Aquaspin SS3000 | |
YASKAWA
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| Type | 型 式 | P / N | 使用装置 |
| Robot | XU-RSM0100 | Ebara EPO-222 CMP | |
| Robot | XU-RCM6420 | AMAT_ECP Slimcell | |
| Robot | XU-RCM6422 | AMAT_ECP Slimcell | |
| Robot | XU-RCM6841 | AMAT_FI for DPN Endura | |
| Robot | XU-RCM6801 | AMAT_FI for DPN Endura | |
| Robot | XU-RCM6802 | AMAT_FI for DPN Endura | |
| Robot | XU-RCM7230 | AMAT_FI for Vantage | |
| Robot | XU-RCM7231 | AMAT_FI for Vantage | |
| Robot | XU-RCM7410 | Axcelis IHEI 701 | |
| Robot | XU-RC400M | AMAT, Rudolph August-AXI-930 | |
| Robot | XU-RC350D | Varian Implant, DNS U3000 | |
| Robot | XU-RCM4900 | Ebara CMP Dry Robot | |
| Robot | XU-RCM4901 | Ebara CMP Wet Robot | |
| Robot | XU-RCM4800 | Ebara CMP Wet Robot | |
| Robot | XU-RCM4700 | ||
| Robot | XU-RCM53E0 | Ebara CMP Wet Robot Ebara F-REX300E | |
| Robot | XU-RCME0A | Ebara CMP Dry Robot Ebara F-REX300E | |
| Robot | XU-RCM5301 | Ebara CMP Wet Robot Ebara F-REX300E | |
| Robot | XU-RCM5301A | Ebara CMP Dry Robot Ebara F-REX300E | |
| Robot | XU-RCM53D0 | Ebara CMP Wet Robot Ebara F-REX300E | |
| Robot | XU-RSM5330 | Ebara CMP Wet Robot Ebara F-REX300E | |
| Robot | XU-RCM9120 | Ebara CMP Dry Robot Ebara F-REX300E | |
| Drive | AMAT FI | ||
| Controller | AMAT FI | ||
| Pre-Aligner | XU-ACP4801 | AMAT FI | |
| Pre-Aligner | XU-ACP4860 | AMAT_FI for DPN | |
| Robot | XU-RCM0410 | NIKON | |
| Robot | YSBL-CHA | NIKON | |
NVLS
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| Type | 型 式 | P / N | 使用装置 |
| NVLS | Indexer | NVLS_CVD | |
| NVLS | Vortex | NVLS_Vector | |
| NVLS | Vortex Traverser | NVLS_Vector | |
| NVLS | Servo Spindle Assy | NVLS_Vector | |
| NVLS | Lift Module | NVLS_Vector | |
| Trust | Trust Controller | NVLS_CVD | |
| NVLS | LTM Type 2 | NVLS_CVD | |
Rorze
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| Type | 型 式 | P / N | 使用装置 |
| Rorze | 700 | AMAT_CMP Mirror/LINTEC Taping | |
| Rorze | 701 | Ebara_CMP EPO-222 | |
| Rorze | 711 | ||
| Rorze | 713 | Mattson RTP | |
| Rorze | 717 | Mattson RTP | |
| Rorze | 721 | AMAT_Slimcell Process | |
MECS
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| Type | 型 式 | P / N | 使用装置 |
| MECS | APR800 | Canon | |
| MECS | APR8400 | Canon MAS8200 | |
| MECS | UTC100 | Walking Janson 999 | |
| MECS | UTC100P | Nissin Denki NH20-SP | |
| MECS | UTC200R | Mitsubishi APCVD | |
| MECS | UTC820Z | Nissin, Hitachi CD | |
| MECS | UTC800 | Nissin, Walking Janson 999 | |
| MECS | UTC800P | Nissin, Walking Janson 999 | |
| MECS | UTC801P | Nissin, Walking Janson 999 | |
| MECS | |||
| MECS | UTV-2500H | IML-580 | |
| MECS | CS-7100 | Controller | |
| MECS | UTX1000 Series | Nissin, Hitachi ASM | |
| MECS | UTX1100 | ASM | |
| MECS | UTW3400 | Canon MAS8000 | |
| MECS | UTW3100P | Canon MAS1800 | |
| MECS | UTX5500 | CANON ES6 | |
| MECS | UTX-F5500C-006A | Canon AS4 FPA6000 | |
| MECS | Aligner OF250 | ASM Eagle 10;Hitachi 8840 ;Canon anelva 1160 | |
| MECS | Aligner OFH100 | ASM Eagle 10 | |
| Asyst | Model 21 | 12000-053 | |
Daihen
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| Type | 型 式 | P / N | 使用装置 |
| Daihen | SPR-101-X10409 | DISCO Backside grinding | |
| Daihen | SPR956 | Ulvac, AKT | |
| Daihen | SPR955 | ||
| Daihen | SPR951 | ||
| Daihen | SPR907 | ||
| Daihen | SPR906 | DNS | |
| Daihen | SPR903 | DNS | |
| Daihen | SPR902 | ||
| Daihen | SPR8101 | ||
| Daihen | SPR811S | ||
| Daihen | SPR811 | Ulvac | |
| Daihen | SPR809 | Ulvac | |
| Daihen | SPR807 | Ulvac | |
| Daihen | SPR806S | ||
| Daihen | SPR806 | Ulvac | |
| Daihen | SPR805 | ||
| Daihen | SPR802 | Ulvac | |
Other
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| Type | 型 式 | P / N | 使用装置 |
| ASML | MK3 DFA | ASML Rθ Robot | |
| ASML | MK3 Double Arm | ASML_Litho | |
| ASML | MK3 Scara | ASML_Scanner | |
| ASML | SBX92101286-2 | TeliusSP | SEMITOOL | 610T | Semitool |
| Dainippon | Dainippon | Shibuara | |
| Hitachi | CR-68 | Hitachi M531A | |
| Hitachi | CR-712V | Hitachi | |
| Hitachi | AB arm unit | Hitachi S9220 | |
| IDE | DAS300 | LEICA | |
| JEL | SHR3000 | ||
| JEL | SHR3000 | GPTC UFO 300 | |
| JEL | KEM 3000II | ||
| Sumitomo | In air robot | Sumitomo Eaton NV-GSD-HE10 | |
| TAZMO | R THETA Unit | Nikon NSR2205EX14C | |
| TEL | Main ArmZ base | NIKON 5X-I Line | |
| Canon | ES3 | Canon | |
| Canon | ES4 | Canon | |
| Canon | EX6 | Canon | |
| NIKON | ELEVATOR Cam Unit | NIKON 5X-I Line | |
| NIKON | WL Slider unit | Nikon S203 | |
| KLA | Aligner Assembly | KLA FT-750 | |
| KLA | Robot | Robot | |
| NISSIN | Robot hand | NISSIN NH20-SP | |
| TEL | Main ARM | TEL Mark 7/8 | |
| Varian | Carriage Assembly | Varian VIISION80 LE | |
| SMIF | INX2200 INDEXER | ||
| P5000 | |||